TY  - BOOK
AU  - Toan,Nguyen Van
AU  - Ono,Takahito
TI  - Capacitive silicon resonators: performance enhancement methods 
SN  - 9780429266010
AV  - TK7872.D53 T63 2020eb
U1  - 621.3815 23
PY  - 2020///]
CY  - Boca Raton, FL
PB  - CRC Press/Taylor & Francis Group
KW  - Dielectric resonators
KW  - Electric resonators
KW  - Nanoelectromechanical systems
KW  - Semiconductors
KW  - TECHNOLOGY / Electricity
KW  - bisacsh
KW  - TECHNOLOGY / Electronics / Circuits / General
KW  - TECHNOLOGY / Electronics / Microelectronics
N2  - "Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"--
UR  - https://www.taylorfrancis.com/books/9780429266010
UR  - http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
ER  -