Section i Humidity-Sensitive Materials
Chapter 1 Polymers .................................................................................................................................................................. 3
Chapter 2 Metal Oxide in Humidity Sensors ......................................................................................................................... 23
Chapter 3 Al2O3 as a Humidity-Sensitive Material ............................................................................................................... 35
Chapter 4 Carbon-Based Materials ........................................................................................................................................ 51
Chapter 5 Semiconductor-Based Humidity Sensors .............................................................................................................. 91
Chapter 6 Porous Silicon ...................................................................................................................................................... 109
Chapter 7 Mesoporous Silica and Its Prospects for Humidity Sensor Application ............................................................ 139
Chapter 8 Aluminosilicate (Zeolites)-Based Humidity Sensors ........................................................................................ 151
Chapter 9 Metal Phosphate-Based Humidity Sensitive Materials ...................................................................................... 163
Chapter 10 Black Phosphorus and Phosphorene-Based Humidity Sensors ..........................................................................171
Chapter 11 Metal-Organic Framework-Based Humidity Sensors ........................................................................................ 187
Chapter 12 Supramolecular Materials .................................................................................................................................. 209
Chapter 13 Biomaterials as Sensing Elements of Humidity Sensors ................................................................................... 223
Section ii Sensor technologies and Related Materials
Chapter 14 Substrates and Electrodes in Humidity Sensors ................................................................................................ 229
Chapter 15 Fundamentals of Microfabrication Technologies...............................................................................................
Chapter 16 Micromachining Platforms for Humidity Sensors and Examples of Their Fabrication .................................... 263
Chapter 17 Platforms and Materials for QCM and SAW-Based Humidity Sensors ............................................................ 271
Chapter 18 Technologies Suitable for Fabrication of Humidity Sensing Layers: General Consideration ............................ 281
Chapter 19 Polymer Technologies ........................................................................................................................................ 305
Chapter 20 Synthesis of Humidity-Sensitive Metal Oxides: Powder Technologies ............................................................. 339
Chapter 27 Comparative Analysis of Humidity Sensors and Their Advantages and Shortcomings ................................... 445
Chapter 28 Market of Electronic Humidity Sensors ............................................................................................................ 453