Capacitive silicon resonators : performance enhancement methods / Nguyen Van Toan and Takahito Ono.

By:

Toan, Nguyen Van [author.]

Contributor(s):

Ono, Takahito [author.]

Material type: Text

TextPublisher: Boca Raton, FL : CRC Press/Taylor & Francis Group, [2020]Description: 1 online resourceContent type:

text

Media type:

computer

Carrier type:

online resource

ISBN:

9780429266010
0429266014
9780429556524
0429556527
9780429565465
0429565461
9780429560996
0429560990

Subject(s):

DDC classification:

621.3815 23

LOC classification:

TK7872.D53 T63 2020eb

Online resources:

Summary: "Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"-- Provided by publisher.

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"Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"-- Provided by publisher.

OCLC-licensed vendor bibliographic record.

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Capacitive silicon resonators : performance enhancement methods / Nguyen Van Toan and Takahito Ono.

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